A helium compressor is a driving unit for a cryogenic pump system or other refrigeration unit, used to provide high-purity helium gas to the cryogenic pump or other refrigeration unit.
Helium compressors are mainly used in vacuum systems for evaporation, sputtering, and ion implantation in semiconductor pre-processing equipment, and are also widely used in fields such as astronomy, aerospace, and medical etc.

Feature

   High Reliability

  Wide Operating Range

  Lower vibration & Sound Level S High Efficiency

Advantages

High Pressure Chamber

This structure simplified construction (without the tip-seal and thrust bearing) assures stable operation and long life. The mechanical loss is minimized by these optimized forces thus ensuring improved performance.

Oil Injection Cooling System

This system maintains discharge gas and motor temperature at low levels, achieving simultaneously high reliability and high efficiency.